1. Vacuum Chamber

* Internal dimensions approx. 1600 mm in diameter, approx. 900 mm in height
* Cylindrical chamber
* Stainless steel 1.4301
* Large front door
* 4 pc. openings for large-area evaporator sources
* 1 pc sight glass opening with screen
* Various flanges for instrumentation
* Rotation drive for substrate turntable
* 2 sets of steaming plates
* Color RAL 7016 frame, RAL 7035 casing

2. Vaporizer facilities

* 4 large evaporator devices approx. 152 x 635 mm
* 4 pieces of metal argets 152 x 635 x 18 mm
* 4 pieces ignition devices

3. Evaporator supplies

* 4 pieces evaporator supplies, max. 200 A at 100% ED

4. Glow voltage supply

* 1 piece HF glow power supply

5. Pumping system

* 2 pcs. Mechanical backing pump approx. 250 m³/h
* 2 Roots pumps approx. 2000 m³/h
* 1 pc. Oil diffusion pump NW 630
* Chevron Baffle NW 630 with integrated Meissner trap
* Cryocooler PFC 550 for baffle cooling in a closed circuit.
* High vacuum angle valve NW 630
* 3 angle valves NW160
* Piping

6. Pressure measurement

* 2 pieces of Pirani
* 1 piece cold cathode gauge
* 1 piece combination pressure gauge
* 1 piece capacitance manometer for process pressure measurement

7. Gas supply

* 1 pc. mass flow meter
* Shutoff valve controlled separately
* Process pressure regulator

8. Substrate turning device

* 1 pc. carriage approx. 1200 mm diameter, double rotation with 4
Positions for coating 4 pcs. rims up to 7.5″x17″
* 1 pc. carriage approx. 1200 mm diameter, double rotation with 3
Positions for coating 3 pieces of rims over 7″x17″
* 1 piece transport trolley

9. Control cabinet

* 1 piece 19″ control cabinet, height approx. 1800 mm, to accommodate the
computer system along with measuring devices

10. Automatic coating process including hardware

* Computing system based on Pentium processor, integrated in
control desk
* 2.1 GP hard disk, CD-ROM drive
* 17“ color monitor, VGA graphics
* Keyboards
* Software to carry out the automatic coating process
including data collection and storage

11. Electrical supply

* Electrical distribution
* Control panel recording
* Cooling device

12. Control Device

* Allen Bradley SPS
* Allen Bradley PLC software

producer: PVT GmbH
type designation: PVT 1600 SLC 1
condition: used
Amperage 200 A max
Steering Allen Bradley SPS
– automatic coating process including hardware

chemical proceeding